SolutionsManualforIntroductiontoMicroelectronicFabricationVolume5ofModularSeriesonSolidStateDevices2ndEditionbyJaeger
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Complete downloadable Solutions Manual for Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices 2nd Edition by Jaeger. INSTRUCTOR RESOURCE INFORMATION
TITLE: Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices
RESOURCE:Solutions Manual
EDITION: 2nd Edition
AUTHOR: Jaeger
PUBLISHER: Pearson
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Description
Complete downloadable Solutions Manual for Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices 2nd Edition by Jaeger. INSTRUCTOR RESOURCE INFORMATION
TITLE: Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices
RESOURCE:Solutions Manual
EDITION: 2nd Edition
AUTHOR: Jaeger
PUBLISHER: Pearson
Table of content
1. An Overview of Microelectronic Fabrication.
2. Lithography.
3. Thermal Oxidation of Silicon.
4. Diffusion.
5. Ion Implantation.
6. Film Deposition.
7. Interconnections and Contacts.
8. Packaging and Yield.
9. MOS Process Integration.
10. Bipolar Process Integration.
11. Processes for Microelectromechanical SystemsMEMS.
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